Light Sci. Haffner, C. et al. Nat. 25, 458460 (1974). Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. 34, 29412951 (2016). Lett. Power efficiency is crucial for the application of electro-optic modulator (EOM), which depends sensitively on the physical size of the device27. Wolf, S. et al. The authors declare no competing interests. Lithium niobate photonic-crystal electro-optic modulator. carried out the device characterization. The full cross-section is shown in d. c Dispersion property of the partially etched LN photonic-crystal nanobeam, simulated by the finite element method (FEM). Its low operating voltage makes it convenient to use a function generator as the driver. Opt. Lu, H. et al. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages, Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators, Spectral control of nonclassical light pulses using an integrated thin-film lithium niobate modulator, Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits, Femtojoule femtosecond all-optical switching in lithium niobate nanophotonics, Extending the spectrum of fully integrated photonics to submicrometre wavelengths, Ultra-low-power second-order nonlinear optics on a chip, Microstructure and domain engineering of lithium niobate crystal films for integrated photonic applications, Femtofarad optoelectronic integration demonstrating energy-saving signal conversion and nonlinear functions, http://creativecommons.org/licenses/by/4.0/, Controlling single rare earth ion emission in an electro-optical nanocavity, Photonic van der Waals integration from 2D materials to 3D nanomembranes, Hydrothermal growth of KTiOPO4 crystal for electro-optical application, High-performance polarization management devices based on thin-film lithium niobate. EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. Our thin-film modulator (a) has an oxide layer underneath the device layer, so that velocity matching can be achieved while maximum electro-optic efficiency is maintained. When the modulation frequency is increased to 2.0GHz greater than the cavity linewidth, the cavity is too slow to follow the electro-optic modulation, which results in the frequency conversion of photons into sidebands with frequency separation equal to the modulation frequency. Here, we report an EO lithium niobate metasurface mediated by topological corner states. In this lesson the chirp induced by the LiNbO3 is analyzed based on the voltage of operation. New light sheet holography overcomes the depth perception challenge in 3D holograms, First-of-its-kind metalens can focus extreme ultraviolet light, An unprecedented look at biological energy on the sub-cellular level, Harvard John A. Paulson School of Engineering and Applied Sciences. 2 High-speed measurement set-ups. 7a. Heterogeneously Integrated Thin-film Lithium Niobate Electro-optic Using the Lithium Niobate Modulator: Electro-Optical and Mechanical Connections Introduction The purpose of this document is to describe how to use a Lucent Technologies Lithium Niobate (LiNbO 3 ) modulator. 35, 346396 (2017). To show the electro-optic tuning property, we applied a DC voltage to the chip and monitored the cavity transmission spectrum of the \({\mathrm{{TE}}}_{01}^{0}\) mode. Bonded thin film lithium niobate modulator on a silicon photonics platform exceeding 100 GHz 3-dB electrical modulation bandwidth. Google Scholar. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. We expect that these optimization would significantly improve the energy efficiency of the LN photonic-crystal EOM, further decreasing the switching energy down to sub-femtoJoule level. Photonics 2, 433437 (2008). Micro-transfer printing of thin-film lithium niobate offers a solution, but suspending large areas of thin films for long interaction lengths and high-Q resonators is challenging, resulting in a low transfer . The cavity mode exhibits an extremely small electro-optic modal volume of 1.52(/n)3~0.58m3 (where n is the refractive index of LN). 11, 441446 (2017). Express 21, 2700327010 (2013). Opt. A 100, 043811 (2019). Opt. Express 26, 1481014816 (2018). [2304.13760] Reliable micro-transfer printing method for heterogeneous For LN, however, the EOMs developed so far1,13,14,15,16,17,18,19,20,21,22,23,24,25,26 generally exhibit significant dimensions, leading to significant power required to drive the EOMs. B. Ayata, M. et al. 5 implies that the linearity of electro-optic modulation in the devices would reach the intrinsic limit determined by the fundamental Lorentzian shape of the cavity resonance47. Such a configuration reduces the critical requirement of electrode alignment as needed in . Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. We realize an intensity modulator of 12.5 mm long modulation section, which exhibits a low half-wave voltage of 1.7 V and a large 3 dB modulation bandwidth of >70 GHz. The fully on-chip design achieves a full-swing extinction ratio of 11.5dB. Optica 6, 845853 (2019). Electro-optically (EO) tunable metasurfaces have received considerable attention owing to their capability for dynamic light field control. Wood, M. G. et al. High-quality lithium niobate photonic crystal nanocavities. 28, 736739 (2016). Electron. Consequently, the transmission spectrum transforms into a multi-resonance spectrum (Fig. The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. 1e and 2). Integrated lithium niobate electro-optic modulators operating at CMOS CAS Microwave-to-optical conversion using lithium niobate thin-film acoustic resonators. High performance thin-film lithium niobate modulator on a silicon 101, 151117 (2012). Optical waveguides are made of rib etched lithium niobate waveguides with bottom silicon oxide cladding, while SU8 polymer covers the top and sides of the rib waveguides. J. Lightwave Technol. Its a building block that can be integrated into larger optical systems for a range of applications, in sensing, lidar, and data telecommunications.. Cite this article. Thanks to the strong light confinement, we are able to place the electrode fairly close to the cavity without introducing extra optical loss (Fig. & Wang, A. X. The bit-switching energy for NRZ signal is given by \(\frac{1}{4}C{V}_{{\rm{pp}}}^{2}\) (ref. & Essiambre, R. J. The devices exhibit a significant tuning efficiency up to 1.98 GHz V -1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m 3. The left inset shows the orientation of the LN crystal where the optical axis is along the z direction. Li, M., Ling, J., He, Y. et al. 14 April 2023, Light: Science & Applications a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. supervised the project. Alloatti, L. et al. Miller, D. A. Figure3 illustrates the schematic of the experimental testing setup, where the inset shows an optical image of the device with the RF probe in contact. They also thank Wuxiucheng Wang, Lejie Lu, and Ming Gong for valuable discussions and help on testing. Haffner, C. et al. On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. volume11, Articlenumber:4123 (2020) 260-GBaud Single-Wavelength Coherent Transmission over 100-km SSMF As shown in Fig. | 617-496-1351 | lburrows@seas.harvard.edu, Method can depict holograms viewable from any angle as if physically present with continuous depth, Nanofabrication technique, using holes to create vacuum guides, breaks a barrier in optics, Applied Physics, Optics / Photonics, Quantum Engineering, By detecting nanoscopic heat changes inside cells, first-of-their-kind sensors reveal how living systems use energy, Applied Physics, Bioengineering, Health / Medicine, Materials, 150 Western Ave, Allston, MA 02134 Electro-optic modulation enables arbitrary modulation of cavity resonance within the bandwidth allowed by the driving circuit. 4, 518526 (2010). The cavity resonance exhibits a coupling depth of 93%, corresponding to a full-swing extinction ratio of 11.5dB. Optica 6, 860863 (2019). Tzuang, L. D., Fang, K., Nussenzveig, P., Fan, S. & Lipson, M. Non-reciprocal phase shift induced by an effective magnetic flux for light. By combining thin-film lithium niobate devices with high-power lasers using an industry-friendly process, this research represents a key step towards large-scale, low-cost, and high-performance transmitter arrays and optical networks. Boyd, R. W. Nonlinear Optics (Academic, Cambridge, 2003). 7b, c implies that the EOM could operate at higher bit rates, which will left for future demonstration. Extended Data Fig. Tanabe, T., Nishiguchi, K., Kuramochi, E. & Notomi, M. Low power and fast electro-optic silicon modulator with lateral p-i-n embedded photonic crystal nanocavity. The region highlighted in red is the electrode used to drive the photonic-crystal nanoresonator. Karpiski, M., Jachura, M., Wright, L. J. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. 9, 172194 (2015). Quantum Electron. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. Low V silicon photonics modulators with highly linear epitaxially grown phase shifters. Google Scholar. 1d) to maximize the in-plane electric field Ez, while preventing potential loss induced by metal absorption, which results in a significant electro-optic tuning efficiency of 1.81GHzV1, simulated by the finite element method (see Methods for simulation details). the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in The sum of all gray curves is showed in red, which is fitted by the theory. Photonics 13, 359364 (2019). 42.70.a. Internet Explorer). All of these applications require chip-scale electro-optic modulators that operate at voltages compatible with complementary metaloxidesemiconductor (CMOS) technology, have ultra-high electro-optic bandwidths and feature very low optical losses. 8b, c. The data that support the findings of this study are available from the corresponding author upon reasonable request. Anyone you share the following link with will be able to read this content: Sorry, a shareable link is not currently available for this article. Sci. ISSN 1476-4687 (online) In the meantime, to ensure continued support, we are displaying the site without styles A. Appl. The LN photonic-crystal nanobeam has a width of w=1200nm, layer thickness of t=300nm, and a partially etched wing layer with a thickness of 150nm. Mercante, A. J. et al. a, Set-up for measuring the modulator electro-optic responses from 35GHz to 100GHz. Recently, heterogeneously integrated silicon and lithium niobate (Si/LN) optical modulators have demonstrated attractive overall performance in terms of optical loss, drive voltage, and modulation bandwidth. High-speed Femto-Joule per bit silicon-conductive oxide nanocavity modulator. Technol. Opt. CAS The 50-m width of the electrode (Fig. 314, 317 (2014). Express 21, 3035030357 (2013). P.W. Peer review information Nature Communications thanks Huihui Lu, and the other, anonymous, reviewer(s) for their contribution to the peer review of this work. CAS Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Photon. & Lin, Q. Quantum correlations from dynamically modulated optical nonlinear interactions. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. In the past decade, photonic-crystal EOMs have been developed on various material platforms such as silicon32,33,34, GaAs35, InP36, polymers37,38, ITO39, etc. conceived the experiment. PubMed The photonic-crystal hole structure was patterned with ZEP-520A positive resist via electron-beam lithography, which was then transferred to the LN layer with an Ar+ plasma milling process to etch down the full 300-nm depth. Chen, L., Wood, M. G. & Reano, R. M. 12.5 pm/V hybrid silicon and lithium niobate optical microring resonator with integrated electrodes. 35, 411417 (2017). A review of lithium niobate modulators for fiber-optic communications systems. Integrated lithium niobate electro-optic modulators: when performance e Lattice constant a as a function of position, which is optimized for low insertion loss together with high radiation-limited optical Q. f Top view of the FEM-simulated optical mode field profile of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\). The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. Reed, G. T., Mashanovich, G., Gardes, F. Y. Chen, X. et al. Device fabrication is performed at the Harvard University Center for Nanoscale Systems, a member of the National Nanotechnology Coordinated Infrastructure Network, which is supported by the NSF under ECCS award no. BER versus OSNR for the three modulation schemes at 70Gbaud. 24, 234236 (2012). Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. Recently, thin-film monolithic LN11,12 emerges as a promising platform, where low-loss and high-quality photonic integration together with the strong Pockels effect enables superior modulation performance13,14,15,16,17,18,19,20,21,22,23,24,25,26, showing great potential as an excellent medium for photonic integrated circuits and future photonic interconnect. 8, 701705 (2014). Open Access articles citing this article. You are using a browser version with limited support for CSS. Nature 568, 373377 (2019). and Q.L. Internet Explorer). In most cases, lasers are stand-alone devices, external to the modulators, making the whole system more expensive and less stable and scalable. Thorlabs.com - Free-Space Electro-Optic Modulators C.W. & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. The inset of a shows the measured normalized transmission (NT) on a logarithmic scale, revealing an extinction ratio of 30 dB. Express 19, 75307536 (2011). In this research, we used all the nano-fabrication tricks and techniques learned from previous developments in integrated lithium niobate photonics to overcome those challenges and achieve the goal of integrating a high-powered laser on a thin-film lithium niobate platform.. ac, Normalized optical transmission of the 20-mm (a), 10-mm (b) and 5-mm (c) device as a function of the applied voltage, showing half-wave voltages of 1.4V, 2.3V and 4.4V, respectively. Nature 556, 483486 (2018). Preprint at https://arxiv.org/abs/1803.10365 (2018). Configuration of the FDTD simulation. The 0.8 m lithium niobate layer a Full SEM image of the whole-device structure. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. Opt. Lithium Niobate Nonlinear Thermal Waveguide MODE Automation API Nonlinear Optics Photonic Integrated Circuits - Active Computing Second-harmonic generation (SHG) in a Lithium Niobite - LiNbO3 (LNO) nanophotonic waveguide is studied using temperature modulation to achieve efficient phase matching. A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. Optica 1, 112118 (2014). The best-known electro-optic Pockels material is probably lithium niobate (LiNbO3, LN), which has been widely used in telecommunication1. For the application of high-speed electro-optic switching, our simulations show that the electrode-waveguide spacing can be decreased to 1.5m for an optical Q of ~5000 (corresponding to a modulation bandwidth of ~45GHz), which will improve the modulation efficiency to 2.38GHzV1 (simulation details in Methods). Publishers note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Introduction to Lithium Niobate - Academic Accelerator 20, 150157 (2014). wrote the manuscript with contribution from all authors. Lithium Niobate Nonlinear Thermal Waveguide - Ansys Optics Open Access Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. PubMedGoogle Scholar. Article The large metal pads (highlighted in blue box) are used simply as the contacts for the air-coplanar probe (Formfactor Acp65-A-GSG-100) for applying the RF driving signal (see also the inset of Fig. 8c) due to the decrease of optical mode confinement. Top. ADS Near-field enhancement of optical second harmonic generation in hybrid The light reflected from the EOM was collected by the same lensed fiber, routed by a circulator, and then delivered to a photodiode for detection. The researchers combined the laser with a 50 gigahertz electro-optic modulator in lithium niobate to build a high-power transmitter. For microwave simulations, the electric-field values are obtained when a voltage of 1V is applied across the two electrodes. Phys. LiNbO. Appl. To show this phenomenon, we applied a sinusoidal RF signal at a certain frequency to the EOM and monitored the transmission spectrum of the device by scanning laser back and forth across the cavity resonance. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. 8b), which, however, might sacrifice the optical Q due to metallic losses. Ultra-high-linearity integrated lithium niobate electro-optic modulators This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. 8 shows that there are considerable rooms to further improve the EOM performance. Nature 562, 101104 (2018). Thin-film lithium niobate (TFLN) has emerged via recent progress in fabrication [20, 21] as a photonics platform with a unique set of capabilities for high-speed applications [22,23,24].While bulk and diffuse-waveguide LN have long been the workhorses of telecommunication technologies, TFLN waveguides offer nanometer-scale confinement, reducing device size, nonlinear thresholds, and switching . PSI offers ultra-high-speed lithium niobate phase modulators. wrote the manuscript with contribution from all authors. Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Express 26, 15471555 (2018). Nat. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. Express 26, 15471555 (2018). High-performance hybrid silicon and lithium niobate Mach Zehnder modulators for 100 Gbit s1 and beyond. 16, 18 (2018). 1 Ultra-high-linearity integrated lithium niobate electro-optic modulators Hanke Feng1, Ke 1Zhang1, Wenzhao Sun , Yangming Ren2,3, Yiwen Zhang1, Wenfu Zhang2,3 & Cheng Wang1* 1Department ofElectricalEngineering&StateKeyLaboratory TerahertzandMillimeterWaves, City University of Hong Kong, Kowloon, Hong Kong, China 2Institute of Optics and Precision Mechanics, Chinese Academy of Sciences . 27 March 2023, Receive 51 print issues and online access, Get just this article for as long as you need it, Prices may be subject to local taxes which are calculated during checkout. Femtojoule electro-optic modulation using a siliconorganic hybrid device. Photon. The RF driving power is 16mW. MathSciNet Provided by the Springer Nature SharedIt content-sharing initiative. Light Sci. Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, saidMarko Loncar, the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. a Recorded scattering parameter S21 for two devices with optical Q of ~14,000 (blue curve) and ~20,000 (orange curve), respectively. 7, 10031013 (2019). The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. Laser Photonics Rev. The modulator utilizes spiral-shaped optical waveguides on Z-cut lithium niobate and the preeminent electro-optic effect which is applied using top and bottom electrodes. Optica Publishing Group on Twitter: "View Spotlight analysis of the # Integrated modulator platforms based on materials such as silicon, indium phosphide or polymers have not yet been able to meet these requirements simultaneously because of the intrinsic limitations of the materials used. Ayata, M. et al. With a balance between the optical Q and the electro-optic tuning efficiency, we adopt a design with a 2.1-m gap and a 150-nm-thick wing layer to achieve the performance demonstrated in this paper, which is highlighted in red in Fig. Thorlabs free-space electro-optic (EO) amplitude and phase lithium niobate modulators combine our experience with crystal growth and electro-optic materials. Shakoor, A. et al. Nature (Nature) Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows Streshinsky, M. et al. Chirp in Mach-Zehnder Lithium Niobate Modulators - Optiwave Cai, L. et al. Here the modulator is analyzed in a dual-drive design shown in Figure 1 (where V1 = -V2). C.W., M.Z. Res. Thin-Film Lithium Niobate Modulator Sets New Performance Records Extended Data Fig. The modulators enable efficient electro-optic driving of high-Q photonic cavity modes in both adiabatic and non-adiabatic regimes, and allow us to achieve electro-optic switching at 11 Gb s1 with a bit-switching energy as low as 22 fJ. and M.B. Further increase of the modulation frequency shifts apart the two side lobes accordingly, with amplitude decreased, while the position of the center lobe remains unchanged, as expected from the non-adiabatic driving. http://www.fujitsu.com/jp/group/foc/en/products/optical-devices/100gln/, Eospace 2017 Advanced Products. Google Scholar. Laser. 3 Electrical eye diagram at 100Gbaud. J. Lightwave Technol. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. a Schematic of half of the cross-section of the EOM structure. 12, 1700256 (2018). Lithium niobate photonic crystal wire cavity: realization of a compact electro-optically tunable filter. Electron. Science 361, 13581363 (2018). They are also expected to be building blocks for emerging applications such as quantum photonics5,6 and non-reciprocal optics7,8. The energy efficiency of the LN photonic-crystal EOM can be further improved since our current devices are not optimized. Lithium Niobate Electro-Optic Modulators, Fiber-Coupled (1260 nm - 1625 nm) Up to 40 GHz Lithium Niobate (LiNbO 3) Modulators Fiber-Coupled, High-Speed Modulation Intensity, Phase, or I/Q X-Cut or Z-Cut Devices LNP6118 40 GHz Phase Modulator with Polarizer, Z-Cut LN81S-FC 10 GHz Intensity Modulator, X-Cut LNLVL-IM-Z This value primarily reaches the photon-lifetime limit of the EOM cavity (~11ps), as the electrode circuit has much broader spectral response as indicated by the flat S11 reflection spectrum shown in the inset of Fig. Light is coupled into and out of the EOM chip via one lensed fiber. Opt. Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Rep. 7, 46313 (2017). As shown in Fig. 16, 185191 (2010). By submitting a comment you agree to abide by our Terms and Community Guidelines. A review of lithium niobate modulators for fiber-optic communications systems. 8b. b, c Eye diagrams of the photonic-crystal EOM output, measured with 271 NRZ PRBS with a driving voltage of Vpp=2V. The laser wavelength was locked at half wave into the cavity resonance. We achieve this by engineering the microwave and photonic circuits to achieve high electro-optical efficiencies, ultra-low optical losses and group-velocity matching simultaneously. Nat. B. Attojoule optoelectronics for low-energy information processing and communications. Slider with three articles shown per slide. Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. 41, 57005703 (2016). and A.S. fabricated the devices. Wang, C., Zhang, M., Chen, X. et al. Quant. To characterize the performance of high-speed modulation, the majority of the modulated light output was amplified by an erbium-doped fiber amplifier to boost the power, passed through a bandpass filter to remove the amplifier noise, and was then detected by a high-speed detector (New Focus 1024). Google Scholar. and S.C. carried out the device characterization. Harnessing plasma absorption in silicon MOS ring modulators, Resonant plasmonic micro-racetrack modulators with high bandwidth and high temperature tolerance, Photonic van der Waals integration from 2D materials to 3D nanomembranes, A power-efficient integrated lithium niobate electro-optic comb generator. Product Overview. Advanced optical modulation formats. Miller, D. A. The red solid and open circles denote the fundamental and second-order TE-like cavity modes shown in f and g. Our simulations show that there exhibits another mode with eigenfrequency within the band gap (gray open circles). InGaAs/InGaAsP MQW electroabsorption modulator integrated with a DFB laser fabricated by band-gap energy control selective area MOCVD. 4b, the \({\mathrm{{TE}}}_{01}^{0}\) mode exhibits a high loaded optical Q (QL) of 1.34105, which is very close to our numerical simulation, indicating the negligible impact of the electrodes on the optical quality. Although attempts have been made to explore the electro-optic effect in LN photonic crystals40,41,42, the low device quality and poor optoelectronic integration unfortunately limit seriously the operation speed. Google Scholar. By placing the metal electrodes on top and bottom of the waveguide rather than the usual lateral configuration, the electric field is fully overlapping the optical field. 6a). This value can be improved in the future by further optimizing the partially reflective photonic-crystal mirror (Fig. Silicon optical modulators. Nat. 41, 57005703 (2016). Chen, L., Xu, Q., Wood, M. G. & Reano, R. M. Hybrid silicon and lithium niobate electro-optical ring modulator. Integrated microwave photonics. Express 23, 2274622752 (2015). The pure linear electro-optic tuning shown in Fig. High-performance and linear thin-film lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz. Appl. Aoki, M. et al. The electrodes are designed to be placed close to the photonic-crystal resonator (Fig. (Credit: Second Bay Studios/Harvard SEAS). Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in 1 Half-wave voltages of devices with different active lengths. Opt. The high efficiency of electro-optic tuning together with the high optical quality of the EOM resonator enables efficient electrical driving of the optical mode into different dynamic regimes.
lithium niobate modulator tutorial